Design and fabrication of compositionally graded inorganic oxide thin films: Mechanical, optical and permeation characteristics

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Design and fabrication of compositionally graded inorganic oxide thin films: Mechanical, optical and permeation characteristics

Different types of inorganic oxide films composed of a chemical composition gradient single layer were designed, fabricated and characterized. Compositionally graded thin films were created by power-controlled co-sputtering of alumina (Al2O3) and silica (SiO2) at room temperature, allowing the structural design of the film to be tailored at the nanometer scale. Two distinct graded thin films we...

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ژورنال

عنوان ژورنال: Acta Materialia

سال: 2010

ISSN: 1359-6454

DOI: 10.1016/j.actamat.2010.08.011